Campbell, Second Edition.
Solid State Electronic Devices, Streetman. Standard device reference. The lecture and laboratory portions of the course are taught together as one course, each designed to be about one half of the 4 quarter hour course. The primary content of the course is the technology, chemistry and physics of integrated circuit fabrication.
MOS device theory will be applied in interpreting results of testing the integrated circuits fabricated in the lab. Because of time constraints, the course concentrates on silicon IC technology, but the material covered is applicable to other materials systems and microstructures including compound semiconductor devices, and microelectromechanical MEMS technologies used to build devices such as accelerometers, pressure sensors, and optical switches for telecommunications.